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It has a different structure from traditional pile-up style stages. It has an original stage structure which is tough against vibration form outside. |
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Different from the traditional method which finds the peak of the optical power in spiral, it performs the search efficiently by vibrating the stage in high speed within the designated area and searching in two stages as rough search and accurate search. |
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It stores displacement and optical power data into the memory in real time and constructs an optical power map. |
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Accurate positioning is possible with the feedback control at the highest point of the optical power. |
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Low cost and high accuracy operation was achieved by applying the ball screw driving method with a pulse motor to the stage. |
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Based on the Abbe’s principle, the displacement can be accurately measured. A laser scale (Resolution of 0.01 m) is applied to the displacement sensor. |
